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SF6�ֽ�������x�a(ch��n)Ʒ���c(di��n) | |||
���ܙz�y(c��) | ͬ�r(sh��)�z�y(c��)���քe�@ʾSF6늚��O(sh��)���(n��i)�����Ͼߴ����Եķֽ�a(ch��n)�� — SO2��H2S�� | ||
����* | �x�����ȸߡ���(w��n)���Ժã�С�z֪�����_(d��) 0.1µl/L����(sh��)�F(xi��n)��(n��i)�����ϵ����ڙz�y(c��) | ||
���ٙz�y(c��) | �x�ø����ܵęz�y(c��)����*�ęz�y(c��)���̣�����(g��)�z�y(c��)�^�̿����� 1 ��犃�(n��i)��� | ||
����** | *�Ĺ����\��ܣ��������̎����Ҋ����(sh��)�F(xi��n)��(sh��)��(j��)�ă�(ch��)�桢��������ݔ�����w�������{(di��o)��(ji��)�����@ʾ | ||
ʹ�÷��� | �������E��(ji��n)�Σ������������Ԃ��Դ��һ���(n��i)����Ҫ��(bi��o)�� | ||
�ͺĭh(hu��n)�� | ���x�����z�y(c��)HF��SOF2�Ȅ����ֽ�a(ch��n)��Ě���С��ÿ�Ιz�y(c��)ֻ�� 200��300ml���������β���ռ������p���ˌ�(du��)�h(hu��n)������Ⱦ�� | ||
SF6�ֽ�������x���g(sh��)����(sh��) | |||
С�z֪�� | 0.1ppm | ��ȷ��� | ≤95%RH |
��(w��n)���� | �ض�׃��20��~40��r(sh��) | ��≺�� | 86kPa��106kPa |
�����c(di��n)�h�� | ≤±0.1ppm | �Ԃ��Դ | ��(n��i)�ó��늳س�M����B�m(x��)����10С�r(sh��)���� |
��(zh��n)�_�� | �y(c��)��≤2ppm�r(sh��) | ���� | 252×310×98mm |
�`�� | ≤±0.1ppm�y(c��)��>2ppm�r(sh��)���`��≤±0.2ppm | ���� | 2.5kG |
�؏�(f��)�� | SO2��H2S����≤2% | ͨӍ | RS232��USB |
�y(c��)������ | 0~100ppm���ɶ��ƣ� | ||
�ضȷ��� | ��40��ף�50 �� | ||
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